Ozaki, J., Ogiso, Y. Jiang, W. et al. Zhang, M. et al. the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in Science 347, 14231424 (2015). Karpiski, M., Jachura, M., Wright, L. J. 7, 10031013 (2019). You are using a browser version with limited support for CSS. The research was co-authored by Dylan Renaud, Rebecca Cheng, Linbo Shao. Sun, C. et al. Here, we present a heterogeneously integrated EOM based on the lithium niobate-on-insulator (LNOI) platform. Thin-film lithium niobate (LN) has recently emerged as a strong contender owing to its high intrinsic electro-optic (EO) efficiency, industry-proven performance, robustness, and, importantly, the rapid development of scalable fabrication techniques. This work demonstrates the first (to the best of our knowledge) thin film lithium niobate electro-optic modulator operating at a wavelength of 1064 nm. 14 April 2023, Light: Science & Applications Applied Physics, Optics / Photonics, Tiantsai Lin Professor of Electrical Engineering, Leah Burrows The elliptical hole has dimensions of hx=270nm and hy=490nm, and a fully etched depth of 300nm. ADS Lett. Now, researchers from the Harvard John A. Paulson School of Engineering and Applied Sciences (SEAS) in collaboration with industry partners at Freedom Photonics and HyperLight Corporation, have developed the first fully integrated high-power laser on a lithium niobate chip, paving the way for high-powered telecommunication systems. The insertion loss from the on-chip coupling waveguide to the photonic-crystal cavity is measured to be around 2.2dB, calibrated by subtracting the facet coupling and circulator transmission loss. Nozaki, K. et al. Chen, L., Xu, Q., Wood, M. G. & Reano, R. M. Hybrid silicon and lithium niobate electro-optical ring modulator. d Cross-sectional schematic of the EOM structure, where the arrow profile shows the radio frequency (RF) electric field distribution and the color profile shows the optical cavity mode field distribution, both simulated by the FEM method. Lithium niobate, as a traditional multifunctional material, has stimulated a photonics revolution as silicon did for electronics. Phys. Generation of ultrastable microwaves via optical frequency division. Rao, A. Nat. Figure4a shows the transmission spectrum of an EOM when the laser is scanned in the telecom band. Nat. PubMed On the other hand, lithium niobate electro-optic modulators, the workhorse of the optoelectronic industry for decades9, have been challenging to integrate on-chip because of difficulties in microstructuring lithium niobate. Ultrafast electro-optic light with subcycle control. B. Attojoule optoelectronics for low-energy information processing and communications. 1e). Opt. Product Overview. DOI: 10.1364/OL.426083 Abstract L V cm, and the 3 dB electro-optical bandwidth is about 55 GHz. Google Scholar. Light Sci. Top. The measured electrical BER is 3.6105, limited by the signal distortion from the electronic circuit. Article Photonics 13, 8090 (2019). 1e) is still able to produce a well-confined point-defect cavity, with a simulated optical Q of ~105 for the fundamental transverse-electric-like (TE-like) cavity mode, \({\mathrm{{TE}}}_{01}^{0}\), shown in Fig. This can be changed simply by engineering the photonic-crystal mirror on the other side to function as the output port. Haffner, C. et al. For all the recent advances in integrated lithium niobate photonic circuits from frequency combs to frequency converters and modulators one big component has remained frustratingly difficult to integrate: lasers. 24, 3400114 (2018). Such a supercell of metasurface is constructed by two kinds of finite-sized arrays possessing different topological properties via the generalized two-dimensional (2D . IEEE 94, 952985 (2006). 35, 346396 (2017). Express 20, 2246522474 (2012). Device fabrication is performed at the Harvard University Center for Nanoscale Systems, a member of the National Nanotechnology Coordinated Infrastructure Network, which is supported by the NSF under ECCS award no. the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in Lithium niobate (LiNbO3) modulator can be regarded as a technology platform that can add values to optical networks and is suitable for addressing many issues. PubMedGoogle Scholar. Nature thanks M. Hochberg and the other anonymous reviewer(s) for their contribution to the peer review of this work. Electron. Google Scholar. Input requirements, test setups, and mounting instructions will be covered. For example, the capacitance of our device can be significantly decreased since the majority of the metallic parts in the current devices are used for coupling the RF driving signal, which can be removed in a future on-chip integration design. The metal electrode layer (10nm Ti/500 nm Au) was deposited by an electron-beam evaporator and the electrode structure was formed by a lift-off process via ZEP-520A. Express 26, 220232 (2018). Rouvalis, E. Indium phosphide based IQ-modulators for coherent pluggable optical transceivers. Photonics 4, 518526 (2010). Liu, K., Ye, C. R., Khan, S. & Sorger, V. J. 13, 1800228 (2019). IEEE Photon. 4, e255 (2015). The scale bar on the left represents the strength of normalized electrical field (Enorm) for d, f, g. The photonic-crystal cavity is oriented along the y-axis such that the dominant optical field is in parallel with the optical axis of underlying LN medium (Fig. In the meantime, to ensure continued support, we are displaying the site without styles Rev. The extinction ratio can be significantly improved by further optimization of the photonic-crystal mirrors (Fig. The researchers combined the laser with a 50 gigahertz electro-optic modulator in lithium niobate to build a high-power transmitter. The gray regions represents the 3-dB bandwidth limit for two devices, respectively, and the dashed line indicates the 3-dB limit of S21. ADS & Lonar, M. Monolithic ultra-high-Q lithium niobate microring resonator. Photonics 11, 5357 (2017). Opt. To date, it remains an open challenge in realizing a high-speed and energy-efficient modulator at the wavelength scale on the monolithic LN platform. C.W., M.Z. c, d, Numerically simulated microwave (c) and optical (d) field distributions (both shown in Ez components) in the cross-section of the thin-film modulator. Opt. 1e) to achieve a critical coupling. This series of Lithium Niobate fiberoptic Modulators is designed for laboratory test use. J. Lightwave Technol. This is a preview of subscription content, access via your institution. 16, 185191 (2010). Opt. a Schematic of half of the cross-section of the EOM structure. ISSN 0028-0836 (print). Laser Photon. Single-chip microprocessor that communicates directly using light. Although the breaking of the mirror symmetry along the normal direction of the device plane considerably alters the band gap of the photonic crystal (Fig. Mercante, A. J. et al. Miller, D. A. The inset shows the S11 reflection scattering parameter for both devices. Opt. The pure linear electro-optic tuning shown in Fig. IEEE Photonics Technol. Boyd, R. W. Nonlinear Optics (Academic, Cambridge, 2003). 4, e255 (2015). A variety of approaches have been explored for this purpose, including plasmonic structures29,30, slotted dielectric waveguides10, photonic micro-/nanoresonators6,31, etc. a is the lattice constant. By 2026, the global lithium niobate modulator market is estimated to surpass US$36.711 billion by 2026, increasing from US$6.568 billion from 2018. High-performance and linear thin-film lithium niobate MachZehnder modulators on silicon up to 50GHz. Wooten, E. L. et al. IEEE J. Sel. However, the dielectric constant of LN is ~28 at a microwave frequency, much larger than that of air. 5 implies that the linearity of electro-optic modulation in the devices would reach the intrinsic limit determined by the fundamental Lorentzian shape of the cavity resonance47. On the other hand, placing the electrode closer to the photonic-crystal cavity will strengthen as well the driving electric field inside the cavity and thus enhance the electro-optic tuning (Fig. Science 358, 630632 (2017). As a result, a full air cladding would strongly limits the electro-optic coupling, leading to a low efficiency of electro-optic tuning as indicated by the individual black column in Fig. Correspondence to Optical waveguides are made of rib etched lithium niobate waveguides with bottom silicon oxide cladding, while SU8 polymer covers the top and sides of the rib waveguides. Google Scholar. Lett. Electro-optic modulation in slotted resonant photonic crystal heterostructures. Modern advanced photonic integrated circuits require dense integration of high-speed electro-optic functional elements on a compact chip that consumes only moderate power. HR00112090012. The blue column shows another design with broader bandwidth and enhanced electro-optic coupling. Low power 50Gb/s silicon traveling wave MachZehnder modulator near 1300nm. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. Its low operating voltage makes it convenient to use a function generator as the driver. 110 GHz CMOS compatible thin film LiNbO3 modulator on silicon. Reference [18] has recently emerged as a promising approach to realize integrated EO modulators with stronger optical connement and high EO efciencies while occupying a smaller footprint [4], [19]-[22]. Abstract: In this paper, we demonstrate up to 260-GBaud single-wavelength coherent transmission by employing an optical transmitter based on two wide-bandwidth devices: a novel 260-GS/s arbitrary waveform generator with a 10-dB bandwidth of 90-GHz and a thin-film Lithium Niobate I/Q modulator with a 3-dB bandwidth of 110-GHz. 28, 736739 (2016). Low-loss plasmon-assisted electro-optic modulator. Song, M., Zhang, L., Beausoleil, R. G. & Willner, A. E. Nonlinear distortion in a silicon microring-based electro-optic modulator for analog optical links. As an example, a gap of ~1.5m would not only result in an optical Q of ~5000 that helps increase the operation bandwidth to ~45GHz, but also improve the electro-optic tuning efficiency by about 31% to 2.38GHzV1, as highlighted in blue in Fig. & Fan, S. Complete optical isolation created by indirect interband photonic transitions. The modulators are manufactured upon a commercial x-cut lithium niobate on isolator (LNOI) wafer (NANOLN) with a thin-film LN thickness of 500 nm, which is bonded to a buried silica (SiO 2) layer on a 500-m-thick silicon (Si) substrate. 5a, the cavity resonance tunes smoothly with the applied voltage, without any degradation to the lineshape or coupling depth, clearly showing the pure dispersive electro-optic tuning as expected from the Pockels effect. High-quality lithium niobate photonic crystal nanocavities. Dylan Renaud, Daniel Rimoli Assumpcao, Marko Loncar, Emma Lomonte, Martin A. Wolff, Francesco Lenzini, Qiushi Guo, Ryoto Sekine, Alireza Marandi, Minh A. Tran, Chong Zhang, Tin Komljenovic, Timothy P. McKenna, Hubert S. Stokowski, Amir H. Safavi-Naeini, Kengo Nozaki, Shinji Matsuo, Masaya Notomi, Nature Communications 29, 20882096 (1993). The high quality of device fabrication as indicated by the device images implies high performance of the EOM, as we will show below. Quantum frequency conversion and single-photon detection with lithium niobate nanophotonic chips, Integrating planar photonics for multi-beam generation and atomic clock packaging on chip, Sub-1 Volt and high-bandwidth visible to near-infrared electro-optic modulators, http://www.fujitsu.com/jp/group/foc/en/products/optical-devices/100gln/, http://eospace.com/pdf/EOSPACEbriefProductInfo2017.pdf, https://www.thorlabs.com/newgrouppage9.cfm?objectgroup_id=3948, https://doi.org/10.1109/CSICS.2015.7314513. The RF driving power is 16mW. Waveguide-integrated, ultralow-energy GeSi electro-absorption modulators. The devices were fabricated on a 300-nm-thick x-cut single-crystalline LN thin film bonded on a 3-m silicon dioxide layer sitting on a silicon substrate (from NanoLN). Ghelfi, P. et al. This value is the smallest switching energy ever reported for LN EOMs1,13,14,15,16,17,18,19,20,21,22,23,24,25,26, clearly showing the high energy efficiency of our devices. All-plasmonic MachZehnder modulator enabling optical high-speed communication at the microscale. Rao, A. et al. Liu et al. Therefore, the electrodes can be shrunk to 103m2, which would reduce the capacitance considerably to ~0.27fF (~1.0fF if including the integrated wires36), according to our FEM simulations. and M.B. M.L., U.A.J., and S.X. Opt. Google Scholar. IEEE J. Sel. Opt. Express 23, 2352623550 (2015). To show the electro-optic tuning property, we applied a DC voltage to the chip and monitored the cavity transmission spectrum of the \({\mathrm{{TE}}}_{01}^{0}\) mode. Opt. CAS Res. Shambat, G. et al. Thank you for visiting nature.com. High modulation efficiency lithium niobate Michelson interferometer modulator. Azadeh, S. S. et al. performed numerical simulations. Nature Quant. The data sets generated and/or analysed during the current study are available from the corresponding authors on reasonable request. Compact 1D-silicon photonic crystal electro-optic modulator operating with ultra-low switching voltage and energy. Electro-optic modulation enables arbitrary modulation of cavity resonance within the bandwidth allowed by the driving circuit. On the other hand, the electrodes are currently placed far from the photonic-crystal cavity so as to leave the optical mode intact to achieve a high optical Q. Opt. C.W., M.Z. Velocity matching can be achieved with an oxide thickness of about 4,700nm. Weigel, P. O. et al. This work is supported in part by the National Science Foundation (NSF) (ECCS1609549, ECCS-1740296 E2CDA and DMR-1231319) and by Harvard University Office of Technology Development (Physical Sciences and Engineering Accelerator Award). 1 Ultra-high-linearity integrated lithium niobate electro-optic modulators Hanke Feng1, Ke 1Zhang1, Wenzhao Sun , Yangming Ren2,3, Yiwen Zhang1, Wenfu Zhang2,3 & Cheng Wang1* 1Department ofElectricalEngineering&StateKeyLaboratory TerahertzandMillimeterWaves, City University of Hong Kong, Kowloon, Hong Kong, China 2Institute of Optics and Precision Mechanics, Chinese Academy of Sciences . Nat. 6a). After the residue removal, we used diluted hydrofluoric acid to undercut the buried oxide layer to form a suspended photonic-crystal membrane structure (Fig. J. Lightwave Technol. M.Z. Shao, L. et al. RT @OpticaPubsGroup: View Spotlight analysis of the #OPG_JOSA_B paper Spiral waveguide Bragg grating modulator on thin-film Z-cut lithium niobate http://ow.ly . 6b). Hybrid silicon photonic-lithium niobate electro-optic MachZehnder modulator beyond 100 GHz. Lett. Our thin-film modulator (a) has an oxide layer underneath the device layer, so that velocity matching can be achieved while maximum electro-optic efficiency is maintained. Top. and JavaScript. and A.S. fabricated the devices. volume11, Articlenumber:4123 (2020) The modulators enable efficient electro-optic driving of high-Q photonic cavity modes in both adiabatic and non-adiabatic regimes, and allow us to achieve electro . npj Quantum Information Broadband modulation of light by using an electro-optic polymer. Poberaj, G., Hu, H., Sohler, W. & Gnter, P. Lithium niobate on insulator (LNOI) for micro-photonic devices. As the modulation bandwidth is primarily related to the optical Q of the device, it can be engineered flexibly for different application purposes, simply by choosing device with appropriate optical Q. increased the EO modulation efficiency to a voltage-length product of 1.75 Vcm using a shallowly etched lithium niobate waveguide. If you find something abusive or that does not comply with our terms or guidelines please flag it as inappropriate. 42.25.p. PubMed Zhang, M., Wang, C., Cheng, R., Shams-Ansari, A. Low V silicon photonics modulators with highly linear epitaxially grown phase shifters. Janner, D., Tulli, D., Garca-Granda, M., Belmonte, M. & Pruneri, V. Micro-structured integrated electro-optic LiNbO3 modulators. C.W., M.Z., X.C., P.W. The electrodes are designed to be placed close to the photonic-crystal resonator (Fig. Electron-plasmon interaction on lithium niobate with gold nanolayer and its field distribution dependent modulation. Gigahertz speed operation of epsilon-near-zero silicon photonic modulators. Harnessing plasma absorption in silicon MOS ring modulators, Resonant plasmonic micro-racetrack modulators with high bandwidth and high temperature tolerance, Photonic van der Waals integration from 2D materials to 3D nanomembranes, A power-efficient integrated lithium niobate electro-optic comb generator. Express 17, 2250522513 (2009). Thin-film lithium niobate (TFLN) has emerged via recent progress in fabrication [20, 21] as a photonics platform with a unique set of capabilities for high-speed applications [22,23,24].While bulk and diffuse-waveguide LN have long been the workhorses of telecommunication technologies, TFLN waveguides offer nanometer-scale confinement, reducing device size, nonlinear thresholds, and switching . Silicon optical modulators. High-performance hybrid silicon and lithium niobate Mach Zehnder modulators for 100 Gbit s1 and beyond. Monolithic silicon photonic integrated circuits for compact 100+Gb/s coherent optical receivers and transmitters. In this contribution, we simulate, design, and experimentally demonstrate an integrated optical isolator based on spatiotemporal modulation in the thin-film lithium niobate on an insulator waveguide platform. Nat. Express 21, 3035030357 (2013). 2 High-speed measurement set-ups. Express 26, 15471555 (2018). The velocity-matched modulator has a typical insertion loss of 4 dB, drive voltage of 5 V, and electrical return loss of . a, Set-up for measuring the modulator electro-optic responses from 35GHz to 100GHz. Nat. Single-chip microprocessor that communicates directly using light. For example, LNOI phase modulators with relatively low Tanabe, T., Nishiguchi, K., Kuramochi, E. & Notomi, M. Low power and fast electro-optic silicon modulator with lateral p-i-n embedded photonic crystal nanocavity. Light Sci. One-dimensional photonic-crystal nanobeams exhibit exceptional capability of controlling light confinement. Use the Previous and Next buttons to navigate the slides or the slide controller buttons at the end to navigate through each slide. | 617-496-1351 | lburrows@seas.harvard.edu, Method can depict holograms viewable from any angle as if physically present with continuous depth, Nanofabrication technique, using holes to create vacuum guides, breaks a barrier in optics, Applied Physics, Optics / Photonics, Quantum Engineering, By detecting nanoscopic heat changes inside cells, first-of-their-kind sensors reveal how living systems use energy, Applied Physics, Bioengineering, Health / Medicine, Materials, 150 Western Ave, Allston, MA 02134 Thomson, D. J. et al. Tzuang, L. D., Fang, K., Nussenzveig, P., Fan, S. & Lipson, M. Non-reciprocal phase shift induced by an effective magnetic flux for light. Phys. PubMed Central Koeber, S. et al. 27), which is about 22fJ per bit in our EOM. Thank you for visiting nature.com. Broadband electro-optic frequency comb generation in a lithium niobate microring resonator. Google Scholar. 100G/400G LN Modulator. Wooten, E. L. et al. Article Thin film lithium niobate electro-optic modulator with terahertz operating bandwidth.
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